LPC/LPS are small linear-stages with large travel-ranges. The guidance is optimized – especially if the front-side platforms are used. LPS come with strain-sensors, LPC with capacitive sensors for highest accuracy.
| Product-Number | LP_-D00100 | LP_-D00300 | LP_-D00600 | LP_-D01000 | Unit |
| Displacement, closed-loop | 100 | 300 | 600 | 1000 | µm |
| Resolution, LPC
Resolution, LPS |
0.5
1.5 |
1.5
5 |
3.0
9 |
5
15 |
nm |
| Linearity, LPC
Linearity, LPS |
0.02
0.2 |
% | |||
| Repeatability, LPC
Repeatability, LPS |
5
10 |
10
25 |
20
70 |
30
100 |
nm |
| Pitch/Yaw | ±3 | ±3 | ±6 | ±10 | µrad |
| Load | 1 | kg | |||
| Push/Pull | 50/20 | 30/10 | N | ||
| Stiffness | 1.6 | 0.3 | 0.15 | 0.15 | N/µm |
| Resonance, unloaded | 900 | 425 | 225 | 200 | Hz |
| El. Capacitance @ 1V eff. 1kHz | 2.2 | 3.3 | 4.4 | 7.7 | µF |
| Body/Platform-Material | stainless steel/aluminum | ||||
| Operating Temperature | -20..80 | °C | |||
Options:
- Vacuum-Compatibility
- Suitable controller for LPC: EBC-120310
- Suitable controller for LPS: EBD-060310