Piezo-Actuators are principally solid-state bodies, which are deforming when being charged electrically. There is no stiction or friction involved, so that the resolution of displacements is only limited by the noise of the charge-supplying electronics.
EDM-cut flexures used for the levering mechanisms and for guidance are also free of stiction and friction, so that the resolution of the piezo-drives can directly be translated to the positioning tasks.