The double-levers DPO and DPS are actuators driven by our superior MPO piezo-stacks. The large strain of these stacks is allowing for more compact shapes at the same displacements. The guidances and joints are made of electro-eroded flexures, which are avoiding friction, wear and micro-cracks. The life-times are in the order of 10 billion full-stroke cycles. The connection wires are not being moved, when the actuators are driven.
The versions DPS are equipped with strain-gage (SGS) full-bridges. These sensors guarantee temperature-compensated measuring and controlling of motion. DPO are for open-loop operation or to be combined with external sensors.
| Product-Number | DPS-D00075 | DPS-D00100 | DPS-D00250 | DPS-D00500 | DPS-D01000 | Unit |
| Displacement (0..150 V) | 75 | 100 | 250 | 500 | 1000 | µm |
| Displacement
(-45..180 V) |
120 | 160 | 400 | 800 | 1600 | µm |
| Resolution, open loop | 0.15 | 0.2 | 0.3 | 0.5 | 1 | nm |
| Resolution, closed loop | 1.5 | 2 | 6 | 12 | 25 | nm |
| Linearity, closed loop | 0.1 | 0.2 | % | |||
| Repeatability | 6 | 7 | 10 | 30 | 60 | nm |
| Pull/Push, maximum | 200/30 | 150/10 | 100/10 | N | ||
| Stiffness | 4.5 | 3.2 | 0.55 | 0.37 | 0.15 | N/µm |
| Resonance, unloaded | 1150 | 1000 | 550 | 300 | 200 | Hz |
| El. Capacitance @ 1V eff. 1kHz | 2.2 | 3.3 | 3.3 | 6.6 | 9.9 | µF |
| Body-Material | stainless-steel | |||||
| Lenght L | 30 | 48 | 48 | 82 | 112 | mm |
| Height H | 16 | 23 | 23 | 26 | 26 | mm |
| Weight | 24 | 45 | 45 | 87 | 120 | g |
| Oper. Temperature | -20..+80 | °C | ||||
Options:
- Vacuum-Compatibility
- Suitable driver for DPO, EBO-060100
- Suitable controller for DPS, EBD-060310