L2C-D10100 is a high-dynamic XY scanning stage. It is equipped with capacitive position-sensors for top-precision. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. These XY stages are also available with integrated Z-axes and there are long-range versions.
| Product-Number | L2C-D10100 | Unit | ||
| Position-Sensors | Capacitive (Cap) | |||
| Ranges XY, closed loop | 100×100 | µm | ||
| Resolution, closed loop | 0.5 | nm | ||
| Linearity, closed loop | 0.02 | % | ||
| Repeatability | 5 | nm | ||
| Resonance, unloaded | 1100 | Hz | ||
| Resonance, w/ 2.5 kg payload | 500 | Hz | ||
| Load | 3 | Kg | ||
| Push/Pull, in Z | 50/20 | N | ||
| El. Capacitance @ 1Veff 1kHz | 13.2 | µF | ||
| Body/Platform-Material | Aluminum, black | |||
| Weight | 1 | kg | ||
| Operating Temperature | -20.. 80 | °C | ||
| Connector | DSub25 | |||
| Cable length | 1.5 | mm | ||
Options:
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- Vacuum compatibility, and/or non-magnetic
- Suitable controller , EBC-120320