L2C and L2S Stages are made for scanning. The positioning-ranges are 300 or 600 μm. L2C is equipped with capacitive position-sensors for top-precision. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2C and L2S stages are also available with integrated Z-axes and there is a high-dynamic version.
| Product-Number | L2_-D10300 | L2_-D10600 | Unit |
| Position-Sensors | L2C capacitive (cap), L2S strain sensors (SGS) | ||
| Ranges XY, closed loop | 300×300 | 600×600 | µm |
| Resolution, LPC
Resolution, LPS |
1.5
4 |
3
9 |
nm |
| Linearity, LPC
Linearity, LPS |
0.02
0.2 |
% | |
| Repeatability, LPC
Repeatability, LPS |
15
30 |
30
60 |
nm |
| Resonance, unloaded | 210 | 175 | Hz |
| El. Capacitance @ 1Veff 1kHz | 13.2 | µF | |
| Dimensions (LxWxH) | 150x150x30 | mm | |
| Aperture, Dimensions (LxW) | 66×66 | mm | |
| Body/Platform-Material | Aluminum, black | ||
| Operating Temperature | -20.. 80 | °C | |
| Connector | DSub25 | ||
| Cable length | 1.5 | mm | |
Options:
- Vacuum compatibility, and/or non-magnetic
- Suitable controller for LPC, EBC-120320
- Suitable controllers for LPS, EBD-060320 or EBD-120320