LP_ linear stages are made for fast positioning with highest accuracy. This is achieved by:
- stainless-steel body
- symmetric guidance by flexures
- piezo direct drives
There are two platforms the positioning-object can be mounted on: one on top, the other at front. Best accuracy can be reached by using the front platform, because all relevant components get in line: actuator, guidance, sensor, object.
There are 2 ranges available and 3 versions each with different position metrology:
- LPO, w/o sensors
- LPS, w/ strain-gage sensors
- LPC, w/ capacitive sensors
| Product-Number | LP_-_00045 | LP_-_00090 | Unit |
| Displacement (0..150 V) | 45 | 90 | µm |
| Displacement (-45..180 V) | 72 | 143 | µm |
| Resolution, LPO and open loop Resolution, LPS Resolution, LPC |
0.2 1 0.3 |
0.4 2 0.5 |
nm |
| Linearity, LPS Linearity, LPC |
0.2 0.02 |
0.2 0.02 |
% |
| Repeatability, LPS Repeatability, LPC |
5 4 |
10 8 |
nm |
| Push/Pull | 200/25 | 200/25 | N |
| Stiffness | 21 | 10 | N/µm |
| Resonance, unloaded | 3,000 | 2,000 | Hz |
| El. Capacitance @ 1V eff. 1kHz | 3.3 | 6.6 | µF |
| Body-Material | stainless steel | ||
| El. Connectors | LPO: Lemosa LPS and LPC: DSub15 |
||
| Operating Temperature | -20..80 | °C | |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver for LPO, EBO-060100
- Suitable Controller for LPS, EBD-060310
- Suitable Controller for LPC, EBC-120310