L3C-D10100 stages are made for fastest scanning and tracking. The positioning-range for X and Y is 100 μm. These stages are ideal for atomic-force and near-field microscopy. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.
| Product-Number, L3C-D10100-.. | XY100Z20 | XY100Z50 | XY100Z100 | Unit |
| Position-Sensors | Capacitive (Cap) | |||
| Ranges, closed loop | 100/100/20 | 100/100/50 | 100/100/100 | µm |
| Ranges, open loop (-45..+180V) | 140/140/24 | 140/140/60 | 140/140/120 | µm |
| Resolution, closed loop, XY/Z | 0.5/0.1 | 0.5/0.3 | 0.5 | nm |
| Linearity, XY/Z | 0.02/0.07 | % | ||
| Repeatability, XY/Z | 5/2 | 5/3 | 5 | nm |
| Resonance, XY, unloaded | 1100 | Hz | ||
| Resonance, Z, unloaded | 1200 | 760 | 730 | Hz |
| El. Capacitance @ 1Veff 1kHz | XY13.2/Z4.4 | XY13.2/Z4.4 | XY13.2/Z8.8 | µF |
| Dimensions (LxWxH) | 150x150x30 | mm | ||
| Aperture, Dimensions (LxW) | 66×66 | mm | ||
| Body/Platform-Material | Aluminum, black | |||
| Operating Temperature | -20..+80 | °C | ||
| Connector | DSub25 | |||
| Cable length | 1.5 | m | ||
Options:
- Vacuum compatibility and/or non-magnetic
- Suitable controller, LPC, EBC-120330
- Suitable controller, LPS, EBD-060330