L3C- and L3S-Stages are made for scanning and tracking. The basic positioning-range for X and Y is 600 μm. These stages are ideal for atomic-force and nearfield microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.
| Product-Number. L3_D10600-.. | XY600Z20 | XY600Z50 | XY600Z100 | XY600Z300 | Unit |
| Position-Sensors | capacitive sensors (L3C). strain sensors (L3S) | ||||
| Ranges, closed loop | 600/600/20 | 600/600/50 | 600/600/100 | 600/600/300 | µm |
| Ranges, open loop (-45.. 180V) | 720/720/24 | 720/720/60 | 720/720/120 | 720/720/360 | µm |
| Resolution, L3C
Resolution, L3S |
3/0.1
6/0.5 |
3/0.3
6/1 |
3/0.5
6/1 |
3/1.5
6/3 |
nm |
| Linearity, L3C, XY/Z
Linearity, L3S |
0.02/0.07
0.2 |
% | |||
| Repeatability, L3C
Repeatabilty, L3S |
30/1
60/2 |
30/3
60/5 |
30/5
60/10 |
30/15
60/60 |
nm |
| Resonance XY, unloaded | 160 | Hz | |||
| Resonance, Z, unloaded | 550 | 520 | 510 | 410 | Hz |
| El. Capacitance @ 1Veff 1kHz | XY13.2/Z4.4 | XY13.2/Z8.8 | XY13.2/Z13.2 | µF | |
| Dimensions (LxWxH) | 150x150x30 | mm | |||
| Aperture, Dimensions (LxW) | 66×66 | mm | |||
| Body/Platform-Material | Aluminum. black anodized | ||||
| Operating Temperature | -20.. 80 | °C | |||
| Connector | DSub25 | ||||
| Cable length | 1.5 | m | |||
Options:
- Vacuum compatibility and/or non-magnetic
- Suitable controller, LPC, EBC-120330
- Suitable controller, LPS, EBD-060330