L3C- and L3S-Stages are made for scanning and tracking. The basic positioning-range for X and Y is 300 μm. These stages are ideal for atomic-force and near-field microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.
| Product-Number. L3_D10300-.. | XY300Z20 | XY300Z50 | XY300Z100 | XY300Z300 | Unit |
| Position-Sensors | capacitive sensors (L3C). strain sensors (L3S) | ||||
| Ranges, closed loop | 300/300/20 | 300/300/50 | 300/300/100 | 300/300/300 | µm |
| Ranges, open loop (-45.. 180V) | 480/480/24 | 480/480/60 | 480/480/120 | 480/480/360 | µm |
| Resolution, L3C
Resolution, L3S |
1.5/0.1
1.5/0.5 |
1.5/0.1.5
1.5/1 |
1.5/0.5
1.5/1 |
1.5/1.5
1.5/1.5 |
nm |
| Linearity, L3C, XY/Z
Linearity, L3S |
0.02/0.07
0.2 |
% | |||
| Repeatability, L3C
Repeatabilty, L3S |
15/1
30/2 |
15/3
30/5 |
15/5
30/10 |
15/15
30/30 |
nm |
| Resonance XY, unloaded | 185 | Hz | |||
| Resonance, Z, unloaded | 680 | 600 | 580 | 450 | Hz |
| El. Capacitance @ 1Veff 1kHz | XY13.2/Z4.4 | XY13.2/Z8.8 | XY13.2/Z13.2 | µF | |
| Dimensions (LxWxH) | 150x150x30 | mm | |||
| Aperture, Dimensions (LxW) | 66×66 | mm | |||
| Body/Platform-Material | Aluminum. black anodized | ||||
| Operating Temperature | -20.. 80 | °C | |||
| Connector | DSub25 | ||||
| Cable length | 1.5 | m | |||
Options:
- Vacuum compatibility and/or non-magnetic
- Suitable controller, LPC, EBC-120330
- Suitable controller, LPS, EBD-060330