L2C-D0xxxx are compact XY piezo-stages. Ranges go from 100 to 1200 μm. L2C are equipped with capacitive position-sensors for top-precision. The consumption of space is minimized. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion.
| Product-Number | L2C-D00100 | L2C-D00300 | L2C-D00600 | L2C-D01200 | Unit |
| Displacement, closed-loop | 100 | 300 | 600 | 1200 | µm |
| Resolution | 0.5 | 1.5 | 3.0 | 6 | nm |
| Linearity | 0.02 | % | |||
| Repeatability | 5 | 20 | 40 | 80 | nm |
| Pitch/Yaw | ±3 | ±3 | ±6 | ±12 | µrad |
| Load | 1 | kg | |||
| Push/Pull | 50/20 | 30/10 | N | ||
| Stiffness | 1.6 | 0.3 | 0.15 | 0.1 | N/µm |
| Resonance, unloaded | 900 | 425 | 225 | 150 | Hz |
| El. Cpctnc. /axis @ 1V eff. 1kHz | 2.2 | 3.3 | 4.4 | 13.2 | µF |
| Body/Platform-Material | stainless steel/aluminum | ||||
| Operating Temperature | -20..80 | °C | |||
Options:
- Vacuum-Compatibility
- Dowel-Pins
- Suitable controller: EBC-120320