CPO-L00100 and CPS-D00100 are compact Z-stages with smallest dimensions. The footprint is 40×40 mm only.
Product-Code | CPO-L00100 | CPS-D00100 | Unit |
Position-Sensor | SGS, Full-Bridge | ||
Range, Closed Loop | – | 100 | µm |
Range, Open Loop (0..150 V) | 75 | µm | |
Range, Open Loop (-45..180 V) | 120 | µm | |
Resolution, open loop | 0.5 | nm | |
Resolution, closed loop | – | 1 | nm |
Linearity, closed loop | – | 0.2 | % |
Repeatability | – | 10 | nm |
Push/Pull | 15/10 | N | |
Lateral Force | 10 | N | |
Stiffness | 1.5 | N/µm | |
Resonance, unloaded | 370 | Hz | |
Resonance, with 100 g load | 310 | Hz | |
Electrical Capacitance @ 1V eff, 1kHz | 2.2 | µF | |
Body-Material | Aluminium, stainless steel | ||
Wire-Length | 1.5 | m | |
Connector | Lemo | DSub15 | |
Operating Temperature | -20.. 80 | °C |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-060100
- Suitable Controller, closed-loop, EBD-060310