| Product-Number | C3O-L00100 | C3S-D00100 | Unit |
| Position-Sensor | – | SGS | |
| Displacement (0..150 V) | 75 | 75 | µm |
| Displacement (-45..180 V) | 120 | 120 | µm |
| Displacement, closed loop | – | 100 | µm |
| Resolution, open loop | 0.5 | 0.5 | nm |
| Resolution, closed loop | – | 1 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 10 | nm |
| Systematic Crosstalk | 200 | nm | |
| Push/Pull | 15/10 | N | |
| Stiffness | 1.5 | N/µm | |
| Resonance, unloaded | 370 | Hz | |
| Resonance, w/ load 30g | 310 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 2.2/axis | µF | |
| Body-Material | aluminum, stainless steel | ||
| Dimensions | 40x40x44.6 | mm | |
| Mass | 230 | g | |
| Wire-Length | 1.5 | m | |
| Connectors | Lemosa | DSub | |
| Operating Temperature | -20..80 | °C | |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Drivers, open-loop, EBO-060100
- Suitable Controller, closed-loop, EBD-060330