Product-Number | C2O-L00600 | C2S-D00600 | Unit |
Position-Sensor | – | SGS | |
Range (-45..180 V) | 900×900 | 900×900 | µm |
Range, closed loop | – | 600×600 | µm |
Resolution, open loop | 4 | 4 | nm |
Resolution, closed loop | – | 6 | nm |
Linearity, closed loop | – | 0.2 | % |
Repeatability, closed loop | – | 50 | nm |
Push/Pull | 50/20 | N | |
Stiffness | 0.15 | N/µm | |
Lowest Resonances, unloaded | 190/145 | Hz | |
El. Capacitance @ 1V eff. 1kHz | 4.4/axis | µF | |
Body-Material | aluminum, stainless steel | ||
Dimensions | 60x60x33 | mm | |
Wire-Length | 1.5 | m | |
Connectors | Lemosa | DSub | |
Operating Temperature | -20.. 80 | °C |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Drivers, open-loop, EBO-060100
- Suitable Controller, closed-loop, EBD-060320