C1O-L00600 and C1S-D00600 are compact X-stages with smallest dimensions at ranges as long as 900 µm. The size is 60x60x21.5 mm only.
| Product-Number | C1O-L00600 | C1S-D00600 | Unit |
| Position-Sensor | – | SGS | |
| Range (-45..180 V) | 900 | 900 | µm |
| Range, closed loop | – | 600 | µm |
| Resolution, open loop | 4 | 4 | nm |
| Resolution, closed loop | – | 6 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 50 | nm |
| Load | 200 | g | |
| Push/Pull | 50/20 | N | |
| Stiffness | 0.15 | N/µm | |
| Lowest Resonance, unloaded | 190 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 4.4/axis | µF | |
| Body-Material | aluminum, stainless steel | ||
| Dimensions | 60x60x21.5 | mm | |
| Wire-Length | 1.5 | m | |
| Connector | Lemosa | DSub15 | |
| Operating Temperature | -20.. 80 | °C | |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-060100
- Suitable Controller, closed-loop, EBD-060310