C1O-L00100 and C1S-D00100 are compact X-stages with smallest dimensions. The footprint is 40×40 mm only. The stiffness and lowest resonances are comparably high. So that the stages can be employed high-dynamically.
Product-Number | C1O-L00100 | C1S-D00100 | Unit |
Position-Sensor | – | SGS | |
Range (-45..180 V) | 120 | 120 | µm |
Range, closed loop | – | 100 | µm |
Resolution, open loop | 0.5 | 0.5 | nm |
Resolution, closed loop | – | 1 | nm |
Linearity, closed loop | – | 0.2 | % |
Repeatability, closed loop | – | 10 | nm |
Load | 500 | g | |
Push/Pull | 15/10 | N | |
Stiffness | 1.5 | N/µm | |
Lowest Resonance, unloaded | 370 | Hz | |
Lowest Resonance, w/ load 30g | 310 | Hz | |
El. Capacitance @ 1V eff. 1kHz | 2.2/axis | µF | |
Body-Material | aluminum, stainless steel | ||
Dimensions | 40x40x20 | mm | |
Wire-Length | 1.5 | m | |
Connector | Lemosa | DSub15 | |
Operating Temperature | -20.. 80 | °C |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-060100
- Suitable Controller, closed-loop, EBD-060310