SF_ MegaFocus are positioners/scanners with a range as long as 1200 µm for microscope objectives. Mounting and exchange is made simple by clamping the unit to the top adapter by a standard screw (Allen-key). MegaFocus positioners are equipped with capacitive sensors for highest positioning accuracy. Of course, an open-loop version is available.
Product-Code | SFC-D21200 | Unit |
Position-Sensor | Capacitive | |
Range, Closed Loop | 1200 | µm |
Resolution, closed loop | 6 | nm |
Linearity, closed loop | 0.02 | % |
Repeatability, 100 µm | 60 | nm |
Pitch/Yaw | 60 | µrad |
Push/Pull | 10 | N |
Load | 150 | g |
Stiffness | 0.07 | N/µm |
Resonance, unloaded | 200 | Hz |
Resonance, w/ 150g load | 100 | Hz |
Electrical Cap. @ 1V eff, 1kHz | 13 | µF |
Body-Material | aluminum/stainless-steel | |
Wire-Length | 1.5 | m |
Operating Temperature | -20..80 | °C |
Options:
- Vacuum-Compatibility
- Suitable Driver, open-loop, EBO-060100
- Suitable Controller, closed-loop, EBC-120310