L3a Stages are made for scanning and tracking. The basic positioning-range for X and Y is 300 μm. These stages are ideal for atomic-force and near-field microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.
| Product-Number | XY300Z20 | XY300Z50 | XY300Z100 | XYZ300 | Unit |
| Position-Sensors | Strain-Gage, Full-Bridge | ||||
| Ranges, closed loop | 300/300/20 | 300/300/50 | 300/300/100 | 300/300/300 | µm |
| Ranges, open loop (-45.. 180V) | 480/480/24 | 480/480/60 | 480/480/120 | 480/480/360 | µm |
| Resolution, closed loop, XY/Z | 3/0.2 | 3/0.3 | 3/0.5 | 3/1.5 | nm |
| Resolution, open loop, XY/Z | 1.5/0.1 | 1.5/0.3 | 1.5/0.5 | 1.5/1.5 | nm |
| Linearity, closed loop | 0.2 | % | |||
| Repeatability, XY/Z | 30/2 | 30/5 | 30/10 | 30/30 | nm |
| Resonance, XY, unloaded | 185 | Hz | |||
| Resonance, Z, unloaded | 680 | 600 | 580 | 450 | Hz |
| El. Capacitance @ 1Veff 1kHz | XY13.2/Z4.4 | XY13.2/Z8.8 | XY13.2/Z13.2 | µF | |
| Dimensions (LxWxH) | 150x150x30 | mm | |||
| Aperture, Dimensions (LxW) | 66×66 | mm | |||
| Body/Platform-Material | Aluminum, black | ||||
| Operating Temperature | -20.. 80 | °C | |||
| Connector | DSub25 | ||||
| Cable length | 1.5 | m | |||
- Vacuum-Compatibility and/or Non-Magnetic
- Suitable drivers, open-loop, EBO-050100
- Suitable controller, closed-loop, EBD-120230