L2C and L2S Stages are made for scanning. The positioning-ranges are 100, 300 or 600 μm. L2C is equipped with capacitive position-sensors for top-precision. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2C and L2S stages are also available with integrated Z-axes (see L3_).
|Position-Sensors||L2C capacitive (cap), L2S strain sensors (SGS)|
|Ranges XY, closed loop||100×100||300×300||600×600||µm|
|El. Capacitance @ 1Veff 1kHz||13.2||µF|
|Aperture, Dimensions (LxW)||66×66||mm|
- Vacuum compatibility, and/or non-magnetic
- Suitable controller for LPC, EBC-120320
- Suitable controllers for LPS, EBD-060320 or EBD-120320