- Z Insert-Stages
- 120/250/500 µm
- opt. sample holders
| Product-Number | SPS-D10120 | SPS-D10250 | SPS-D10500 | Unit |
| Displacement Sensor | strain gages, full-bridge | |||
| Displacement, closed loop | 120 | 250 | 500 | µm |
| Displacement (-30..160 V) | 150 | 320 | 650 | µm |
| Resolution, open loop | 0.4 | 0.8 | 2 | nm |
| Resolution, closed loop | 0.6 | 1.3 | 3 | nm |
| Linearity, closed loop | 0.1 | % | ||
| Repeatability, closed loop | 6 | 13 | 25 | nm |
| Push/Pull | 50/20 | 40/15 | 40/15 | N |
| Resonance, unloaded | 380 | 250 | 150 | Hz |
| Resonance, 125g load | 270 | 180 | 110 | Hz |
| Resonance, 250g load | 220 | 140 | 90 | Hz |
| El. Capacitance @ 1V eff. 1kHz | 4.4 | 8.8 | 13.2 | µF |
| Electrical Connection | D-Sub 15 | |||
| Dimensions, L x W x H | 220 x 135 x 27.3 | mm | ||
| Aperture, L x W | 128.5 x 86.5 | mm | ||
| Body-Material | aluminum, black anodized | |||
| Operating Temperature | -20..80 | °C | ||
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