- 200 µm
- fast
- compact
- various adapters
| Product-Code | SFS-D00200 | Unit |
| Position-Sensor | SGS, Full-Bridge | |
| Range, Closed Loop | 200 | µm |
| Range, Open Loop (-45..180 V) | 250 | µm |
| Resolution, open loop | 1 | nm |
| Resolution, closed loop | 2 | nm |
| Linearity, closed loop | 0,2 | % |
| Repeatability | 20 | nm |
| Load | 130 | g |
| Push/Pull, maximum | 10/5 | N |
| Lateral Force, maximum | 5 | N |
| Stiffness | 0,1 | N/µm |
| Resonance, with thread-adapter | 200 | Hz |
| Resonance, with 125 g objective | 80 | Hz |
| Elektrical Capacitance @ 1V eff, 1kHz | 2.2 | µF |
| Body-Material | aluminum/stainless-steel | |
| Weight, without/with thread-adapter | 80/140 | g |
| Operating Temperature | -20..+80 | °C |
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