February 2017, CUBE!
Compact 3D Piezo-Positioner
The compact 3D piezo-stage CUBE! offers ranges of 100 µm in XYZ. Dimensions are as small as 40x40x44 mm. Target positions can be reached in some 10 milliseconds. There are versions for UHV environment and also high magnetic fields available. CUBE! has integrated position-sensors, which linearize the curve target/command to 0.2%. It is of course available without sensors, for applications with superposed sensoring. Larger versions of CUBE! offer up to 500 µm range per axis.